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AFM OBSERVATION OF Si (100) SURFACE AFTER HYDROGEN ANNEALING AND WET CHEMICAL PROCESSING

著者名:
Yanase, Y.
Horie, H.
Oka, Y.
Sano, M.
Sumita, S.
Shigematsu, T.
さらに 1 件
掲載資料名:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
1994-7
発行年:
1994
開始ページ:
546
終了ページ:
553
総ページ数:
8
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770385 [1566770386]
言語:
英語
請求記号:
E23400/941397
資料種別:
国際会議録

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