Blank Cover Image

HEAVY METAL AND ORGANIC CLEANING EFFICIENCY OPTIMIZATION AND MONITORING FOR REAL-TIME, IN-LINE PROCESS CONTROL BY SURFACE PHOTOVOLTAGE

著者名:
Jastrzebski, L.
Henley, W.
DeBusk, D.
Haddad, N.
Lowell, J.
Wenner, V.
Nauka, K.
Persson, E.
さらに 3 件
掲載資料名:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
1994-7
発行年:
1994
開始ページ:
530
終了ページ:
536
総ページ数:
7
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770385 [1566770386]
言語:
英語
請求記号:
E23400/941397
資料種別:
国際会議録

類似資料:

1 国際会議録 CONTAMINATION MONITORING USING SURFACE PHOTOVOLTAGE AND APPLICATION TO PROCESS LINE CONTROL

Jastrzebski, Lubek, Lagowski, Jacek, Henley, Worth, Edelman, Piotr

MRS - Materials Research Society
7 国際会議録 Small signal ac-surface photovoltage technique for noncontact monitoring of near-surface doping for IC-processing

Marinskiy,D.N., Lagowski,J.J., Wilson,M., Jastrzebski,L., Santiesteban,R., Elshot,K.

SPIE-The International Society for Optical Engineering
2 国際会議録 MONITORING IRON CONTAMINATION IN SILICON BY SURFACE PHOTOVOLTAGE AND CORRELATION TO GATE OXIDE INTEGRITY

Henley, Worth B., Jastrzebski, Lubek, Haddad, Nadim F.

MRS - Materials Research Society
8 国際会議録 Analysis of Hydrogenation in Thin Film Polycrystalline Silicon Using Surface Photovoltage Measurement Technique

Henley, W., Ostepenko, S., Karimpanakkel, S., Jastrzebski, L., Lagowski, J.

Electrochemical Society
3 国際会議録 Measuring Diffusion Lengths in Epitaxial Silicon by Surface Photovoltage

Lowell, John, Wenner, Valerie, Debusk, Damon

MRS - Materials Research Society
9 国際会議録 Small signal AC-surface photovoltage technique for non-contact monitoring of near surface doping and recombination-generation in the depletion layer

Marinskiy, D., Lagowski, J., Wilson, M., Savtchouk, A., Jastrzebski, L., DeBusk, D.

MRS-Materials Research Society
4 国際会議録 EFFECTS OF RESIDUAL IRON CONTAMINATION INTRODUCED DURING WET CHEMICAL PROCESSING ON THIN OXIDE BREAKDOWN AND RELIABILITY CHARACTERISTICS

Henley, W.B., Jastrzebski, L., Haddad, N.F.

Electrochemical Society
10 国際会議録 Surface photovoltage analysis of iron contamination in silicon processing and the relation to gate oxide integrity

Henley,W.B.

SPIE-The International Society for Optical Engineering
5 国際会議録 CHARACTERIZATION OF SURFACE CLEANS BY SURFACE PHOTO-VOLTAGE AND SURFACE CHARGE IMAGING

Lowell, John, Wenner, Valerie, Jastrzebski, Lubek

MRS - Materials Research Society
11 国際会議録 CONTROL OF MANUFACTURING CLEANING OPERATIONS USING SURFACE PHOTOVOLTAGE TECHMQUES

Hoff, A.M., Persson, E.J., Chacon, J., DeSelms, B.

Electrochemical Society
6 国際会議録 Surface Photovoltage Characterization of Heavy Metal Contamination and Wafer Cleaning Efficiency in Wet Chemical Processes

Rosato, J.J., Hall, R.M., Parry, T.B., Kelly, J.D., Butler, J.N., Jarvis, T.D., Lindquist, P.G.

Electrochemical Society
12 国際会議録 APPLICATIONS OF NON-INVASIVE AC-SURFACE PHOTOVOLTAGE MONITORING IN INTEGRATED CIRCUIT CLEANING

Torek, K., Lee, W., Palsulich, D., Weston, L., Gonzalez, F.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12