INTEGRATED PREDEPOSITION CLEANING/PASSIVATION OF Si SURFACES FOR MOS DEVICES WITH Si02/Si INTERFACES
- 著者名:
Hattangady, S. Misra, V. Yasuda, T. Xu, X.L. Hornung, B. Lucovsky, G. Wortman, J.J. - 掲載資料名:
- Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 1994-7
- 発行年:
- 1994
- 開始ページ:
- 288
- 終了ページ:
- 295
- 総ページ数:
- 8
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770385 [1566770386]
- 言語:
- 英語
- 請求記号:
- E23400/941397
- 資料種別:
- 国際会議録
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