Blank Cover Image

SILICON SURFACE ROUGHENING BY THE DECOMPOSITION OF HYDROGEN PEROXIDE

著者名:
Mertens, P.W.
Verhaverbeke, S.
Heyns, M.M.
Hellemans, L.
Snauwaert, J.
Dillenbeck, K.
さらに 1 件
掲載資料名:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
1994-7
発行年:
1994
開始ページ:
102
終了ページ:
110
総ページ数:
9
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770385 [1566770386]
言語:
英語
請求記号:
E23400/941397
資料種別:
国際会議録

類似資料:

Mertens, P.W., Meuris, M., Schmidt, H.F., Verhaverbeke, S., Heyns, M.M., Carr, P., Graeff, D., Schnegg, A., Kubota, M., …

Electrochemical Society

Trauwaert, M.-A., Kenis, K., Caymax, M., Mertens, P.W., Heyns, M.M., Vanhellemont, J., Graf, D., Wagner, P.

Electrochemical Society

Verneire, B., Rotondaro, A.L.P., Mertens, P.W., Verhaverbeke, S., Heyns, M.M.

Electrochemical Society

Bender, H., Verhaverbeke, S., Heyns, M.M.

Electrochemical Society

Verhaverbeke, S., Meuris, M., Mertens, P., Schmidt, H., Heyns, M.M., Philipossian, A., Graeff, D., Dillenbeck, K.

Electrochemical Society

Schmidt, H.F, Teerlinck, I., Meuris, M., Mertens, P.W., Heyns, M.M.

Electrochemical Society

Meuris, M., Verhaverbeke, S., Mertens, P.W., Schmidt, H.F., Rotondaro, A.L.P., Heyns, M.M., Philipossian, A.

Electrochemical Society

Verhaverbeke, S., Alay, J., Mertens, P., Meuris, M., Heyns, M., Vandervorst, W., Murrell, M., Sofield, C.

Materials Research Society

Teerlinek, I., Gomes, W.P., Strubbe, K., Mertens, P.W., Heyns, M.M.

Electrochemical Society

deBokx, P.K., Kidd, S.J., Wiener, G., Urbach, H.P., De Gendt, S., Mertens, P.W., Heyns, M.M.

Electrochemical Society

Heyns, M. M., Verhaverbeke, S., Meuris, M., Mertens, P. W., Schmidt, H., Kubota, M., Philipossian, A., Dillenbeck, K., …

MRS - Materials Research Society

Verhaverbeke, S., Meuris, M., Schmidt, H., Mertens, P., Heyns, M.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12