The Effect of COP on the Dielectric Breakdown Characteristics of Silicon MOS Capacitor
- 著者名:
Shiota, T. Morita, E. Furukawa, J. Furuya, H. Shingyouji, T. Shimanuki, Y. - 掲載資料名:
- Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 1994-3
- 発行年:
- 1994
- 開始ページ:
- 211
- 終了ページ:
- 221
- 総ページ数:
- 11
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770651 [1566770653]
- 言語:
- 英語
- 請求記号:
- E23400/941395
- 資料種別:
- 国際会議録
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9
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