Non-Contact Full Wafer Evaluation of Deep Levels in Silicon Via Temperature Dependent Surface Recombination Velocity, and Carrier Lifetime
- 著者名:
- 掲載資料名:
- Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 1994-3
- 発行年:
- 1994
- 開始ページ:
- 1
- 終了ページ:
- 14
- 総ページ数:
- 14
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770651 [1566770653]
- 言語:
- 英語
- 請求記号:
- E23400/941395
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
Materials Research Society |
Electrochemical Society |
Electrochemical Society |
Materials Research Society |
Electrochemical Society |
Materials Research Society |
Trans Tech Publications |
MRS - Materials Research Society |
Electrochemical Society |
6
国際会議録
Lifetime Identification of Thermal Oxidation Process Induced Contamination in Silicon Wafers
Trans Tech Publications |
12
国際会議録
Excess Carrier Lifetime and Surface Recombination Velocity in Dielectrically Isolated SI-Tubs
Electrochemical Society |