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Reliability Issues for Submicron Interconnects and Vias

著者名:
Thompson, C.V.  
掲載資料名:
Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
1994-1
発行年:
1994
開始ページ:
176
終了ページ:
180
総ページ数:
5
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770378 [1566770378]
言語:
英語
請求記号:
E23400/941393
資料種別:
国際会議録

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