Surface Damage on GaAs Etched Using a Multipolar Electron Cyclotron Resonance Source
- 著者名:
- 掲載資料名:
- Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 1993-21
- 発行年:
- 1993
- 開始ページ:
- 415
- 終了ページ:
- 424
- 総ページ数:
- 10
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770668 [1566770661]
- 言語:
- 英語
- 請求記号:
- E23400/932473
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
Damage Investigation of GaAs and InGaP Dry Etched with an Electron Cyclotron Resonance Source
Electrochemical Society |
MRS - Materials Research Society |
3
国際会議録
IN-SITU MONITORING BY MASS SPECTROMETRY FOR GaAs ETCHED WITH AN ELEFCTRON CYCLOTRON RESONANCE SOURCE
MRS - Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
Electrochemical Society |
Electrochemical Society |