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Factors Affecting Charge-up in a Magnetically Enhanced RIE Polysilicon Etcher

著者名:
掲載資料名:
Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
1993-21
発行年:
1993
開始ページ:
319
終了ページ:
330
総ページ数:
12
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770668 [1566770661]
言語:
英語
請求記号:
E23400/932473
資料種別:
国際会議録

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