Radical Beam Etching: Application to Patterning of YBa2Cu306+x High Tc Superconducting Thin Films
- 著者名:
- 掲載資料名:
- Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 1993-21
- 発行年:
- 1993
- 開始ページ:
- 275
- 終了ページ:
- 285
- 総ページ数:
- 11
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770668 [1566770661]
- 言語:
- 英語
- 請求記号:
- E23400/932473
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
Materials Research Society |
Materials Research Society |
8
国際会議録
INFLUENCE OF BEAM AND TARGET PROPERTIES ON THE EXCIMER LASER DEPOSITION OF YBa2Cu3O7-X THIN FILMS
Materials Research Society |
Materials Research Society |
Society of Photo-optical Instrumentation Engineers |
Trans Tech Publications |
Materials Research Society |
Trans Tech Publications |
Materials Research Society |
6
国際会議録
Chemical vapor deposition of Aluminum and Gallium Nitride thin films from metal organic precursors
Electrochemical Society |
Kluwer Academic Publishers |