Lissajous Electron Plasma (LEP) Technology for Quarter Micrometer Dry Etch Processes
- 著者名:
Kubota, M. Ohkuni, M. Harafuji, K. Eriguchi, K. Tamaki, T. Nomura, N. Nakayama, I. Sivaram, S. - 掲載資料名:
- Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 1993-21
- 発行年:
- 1993
- 開始ページ:
- 111
- 終了ページ:
- 118
- 総ページ数:
- 8
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770668 [1566770661]
- 言語:
- 英語
- 請求記号:
- E23400/932473
- 資料種別:
- 国際会議録
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Damage Investigation of GaAs and InGaP Dry Etched with an Electron Cyclotron Resonance Source
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