INTRODUCTION OF OXYGEN INTO CVD DIAMOND BY MAGNETO-ACTIVE PLASMA CVD SYSTEM AT LOW SUBSTRATE TEMPERATURE

INTRODUCTION OF OXYGEN INTO CVD DIAMOND BY MAGNETO-ACTIVE PLASMA CVD SYSTEM AT LOW SUBSTRATE TEMPERATURE

著者名:

Yara, T.

掲載資料名:

Proceedings of the Third International Symposium on Diamond Materials

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

1993-17

発行年:

1993

開始ページ:

365

終了ページ:

371

総ページ数:

7

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566770606 [1566770602]

言語:

英語

請求記号:

E23400/932032

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014106
シリーズID:	PA00000028
会議名:	International Symposium on Diamond Materials ; Meeting of The Electrochemical Society
回次:	3rd ; 183rd
会議開催地:	Honolulu, Hawaii, USA
会議開催年:	1993.05.16-1993.05.21

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