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CRITICAL ASPECTS OF WAFER CLEANING AND GATE OXIDE INTEGRITY

著者名:
Mertens, P.W.
Meuris, M.
Schmidt, H.F.
Verhaverbeke, S.
Heyns, M.M.
Carr, P.
Graeff, D.
Schnegg, A.
Kubota, M.
Dillenbeck, K.
de Blank, R.
さらに 6 件
掲載資料名:
Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
1993-15
発行年:
1993
開始ページ:
87
終了ページ:
102
総ページ数:
16
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770590 [1566770599]
言語:
英語
請求記号:
E23400/932030
資料種別:
国際会議録

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