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STUDY OF THE STACKING FAULT NUCLEI GENERATION/ DISSOLUTION TEMPERATURES ON CZ SILICON WAFERS AND ITS DEPENDENCE ON THE CRYSTAL POSITION

著者名:
掲載資料名:
Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
1993-15
発行年:
1993
開始ページ:
16
終了ページ:
25
総ページ数:
10
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770590 [1566770599]
言語:
英語
請求記号:
E23400/932030
資料種別:
国際会議録

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