INFLUENCE OF GROWN - IN DEFECTS IN CZ CRYSTAL ON GATE OXIDE INTEGRITY
- 著者名:
- 掲載資料名:
- Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 1993-15
- 発行年:
- 1993
- 開始ページ:
- 3
- 終了ページ:
- 15
- 総ページ数:
- 13
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770590 [1566770599]
- 言語:
- 英語
- 請求記号:
- E23400/932030
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
MRS - Materials Research Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Materials Research Society |
Electrochemical Society |
Electrochemical Society |
Trans Tech Publications |
Trans Tech Publications |
12
国際会議録
Investigation of the Effect of Thermal History on Ring-OSF Formation in CZ-Silicon Crystals
MRS - Materials Research Society |