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Advanced Wet Cleaning Technology For Highly Reliable Thin Oxides

著者名:
Verhaverbeke, S.
Meuris, M.
Mertens, P.
Schmidt, H.
Heyns, M.M.
Philipossian, A.
Graeff, D.
Dillenbeck, K.
さらに 3 件
掲載資料名:
Proceedings of the fourth International Symposium on Ultra Large Scale Integration Science and Technology : ULSI science and technology/1993
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
1993-13
発行年:
1993
開始ページ:
199
終了ページ:
219
総ページ数:
21
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770637 [1566770637]
言語:
英語
請求記号:
E23400/932028
資料種別:
国際会議録

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1 国際会議録 NEW WET CLEANING STRATEGIES FOR OBTAINING HIGHLY RELIABLE THIN OXIDES

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2 国際会議録 CRITICAL ASPECTS OF WAFER CLEANING AND GATE OXIDE INTEGRITY

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