Blank Cover Image

DOPANT DIFFUSION IN POLYSILLCON

著者名:
掲載資料名:
Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
1993-6
発行年:
1993
開始ページ:
88
終了ページ:
97
総ページ数:
10
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770644 [1566770645]
言語:
英語
請求記号:
E23400/930578
資料種別:
国際会議録

類似資料:

1 国際会議録 KINETICS OF DOPANT PRECIPITATION IN SILICON

Dunham, S.T.

Electrochemical Society
7 国際会議録 Modeling of Transient Enhanced Diffusion Based on Evolution of {311} Defects

Gencer, A.H., Dunham, S.T.

Electrochemical Society
2 国際会議録 Two Stream Model for Dopant Diffusion in Polysilicon Incorporating Effects of Grain Growth

Banerice, S., Dunham, S.T.

Electrochemical Society
8 国際会議録 Boron Diffusion in Oxide - Effect of Incorporated Nitrogen and Fluorine

Navi, M., Dunham, S.T., Kim, B.Y., Kwong, D.L.

Electrochemical Society
3 国際会議録 Models and Parameters for the Coupled Diffusion of Dopants and Point Defects in Silicon

Dunham, S.T., Wittel, F.

Electrochemical Society
9 国際会議録 Modeling of SiO2 Stress Relaxation and Stress Dependent Oxidation

Navi, M., Dunham, S.T.

Electrochemical Society
4 国際会議録 MODELING OF PHOSPHORUS DIFFUSION IN SILICON

Dunham, S.T.

Electrochemical Society
10 国際会議録 MODELS FOR THE PHYSICAL EXETEN OF POINT DEFECT INTER ACTIONS IN SILICON

Agarwal, A.M., Dunham, S.T.

Electrochemical Society
5 国際会議録 A Reduced Moment-Based Model for Precipitation Kinetics and Application to Dopant Activation in Silicon

Clejan, I., Dunham, S.T.

Electrochemical Society
11 国際会議録 Spatial Variations in Point Defect Concentrations and Their Impact on Submicron Device Structures

Dunham, S.T., Agarwal, A.M.

Electrochemical Society
6 国際会議録 HYDROGEN DIFFUSION AND HYDROGEN-DOPANT REACTIONS IN CRYSTALLINE SILICON.

PANTELIDES,S.T.

Trans Tech Publications
12 国際会議録 Modeling Interactions of Point Defects with Precipitates Using the Reduced Precipitation Model

Clejan, I., Dunham, S.T.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12