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Mechanistic Studies of the CVD of Silicon Nitride from SiF4 and NH3

著者名:
掲載資料名:
Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
1993-2
発行年:
1993
開始ページ:
357
終了ページ:
361
総ページ数:
5
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770743 [1566770742]
言語:
英語
請求記号:
E23400/930161
資料種別:
国際会議録

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