Characterization of a Single Wafer Multi-Chamber Clustered EPI System at Reduced Pressure
- 著者名:
Borland, J. Carlson, D. Riggi, C. Florendo, L. Pohl, C. Gong, B. Hey, P. - 掲載資料名:
- Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 1993-2
- 発行年:
- 1993
- 開始ページ:
- 147
- 終了ページ:
- 155
- 総ページ数:
- 9
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770743 [1566770742]
- 言語:
- 英語
- 請求記号:
- E23400/930161
- 資料種別:
- 国際会議録
類似資料:
ESA Publications Division |
Electrochemical Society |
Electrochemical Society |
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SPIE - The International Society of Optical Engineering |
9
国際会議録
Advances in Multi- and Single-Wafer SiC Epitaxy for the Production and Development of Power Diodes
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