Blank Cover Image

Laser Anneal Technology for Enhancement of Poly-Silicon Dopant Activation

著者名:
Ma, Y.
Ahmed, K.Z.
Cunningham, K.L.
Olsen, C.S.
Leung, T.Y.B.
Mcintosh, R.C.
Mayur, A.J.
Liang, H.
Yam, M.
Castle, M.
Muthukrishnan, S.
Liu, P.M.
Foad, M.
Miner, G.E.
Higashi, G.S.
さらに 10 件
掲載資料名:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2004-01
発行年:
2004
開始ページ:
230
終了ページ:
235
総ページ数:
6
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774062 [1566774063]
言語:
英語
請求記号:
E23400/200401
資料種別:
国際会議録

類似資料:

Higashi, G.S., Blonder, G.E., Fleming, C.G.

Materials Research Society

Scott,G.S., Saha,S.K., Olsen,C.S., Nouri,F., Lutze,J., Rubin,M.E., Manley,M.

SPIE - The International Society for Optical Engineering

Olsen,C.S., Nouri,F., Rubin,M.E., Laparra,O., Scott,G.S.

SPIE - The International Society for Optical Engineering

Connors, P.M., Dripps, G.S.

Electrochemical Society

Graoui, H., Hilkene, M., McComb, B., Castle, M., Felch, S., Cowern, N.E.B., Al-Bayati, A., Tjandra, A., Foad, M.A.

Materials Research Society

Cunningham,G.S., Lehovich,A.

SPIE - The International Society for Optical Engineering

P.M. Faia, A.J. Ferreira, C.S. Furtado

Trans Tech Publications

Hanson,K.M., Cunningham,G.S.

SPIE-The International Society for Optical Engineering

Felch, S.B., Graoui, H., Mayur, A.

Electrochemical Society

K.M. Hanson, G.S. Cunningham

Society of Photo-optical Instrumentation Engineers

Rosamillia, J.M., Boone, T., Higashi, G.S.

Electrochemical Society

Cunningham,G.S., Lehovich,A., Hanson,K.M.

SPIE - The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12