EFFECT OF RIE SEQUENCE AND POST-RIE SURFACE PROCESSING ON THE RELIABILITY OF GATE OXIDE lN A TRENCH
- 著者名:
Grebs, T. Ridley, R. Chang, K. Wu, C.-T. Agarwal, R. Mytych, J. Dimachkie, W. Dolny, G. Michalowicz, J. Ruzyllo, J. - 掲載資料名:
- Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2003-26
- 発行年:
- 2003
- 開始ページ:
- 108
- 終了ページ:
- 115
- 総ページ数:
- 8
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774116 [156677411X]
- 言語:
- 英語
- 請求記号:
- E23400/200326
- 資料種別:
- 国際会議録
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