RTP Process to Reduce NMOS to PMOS Isolation Step height Delta
- 著者名:
Khoueir, A. Khoury, M. Zagrehelny, A. Sen, I. Fulford, J. Amzen, D. - 掲載資料名:
- Chemical Mechanical Planarization : proceedings of the International Symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2003-21
- 発行年:
- 2003
- 開始ページ:
- 273
- 終了ページ:
- 282
- 総ページ数:
- 10
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774048 [1566774047]
- 言語:
- 英語
- 請求記号:
- E23400/200321
- 資料種別:
- 国際会議録
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