Bonding and Contacting of MEMS-Structures on Wafer Level
- 著者名:
- 掲載資料名:
- Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2003-19
- 発行年:
- 2003
- 開始ページ:
- 301
- 終了ページ:
- 308
- 総ページ数:
- 8
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774024 [1566774020]
- 言語:
- 英語
- 請求記号:
- E23400/200319
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
7
国際会議録
Mechanical reliabilty of MEMS fabricated by a special technology using standard silicon wafers
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |