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54. Modelling of HfO, film deposition from Hf(mmp)4

著者名:
Yano, T.
Kagotswne, A.
Fujitnoro, T.
Hoshino, M.
Watanabe, T.
Asai, M.
Horii, S.
Miya, H.
Kamiyo, M.
Hirao, K.
さらに 5 件
掲載資料名:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2003-14
発行年:
2003
開始ページ:
437
終了ページ:
442
総ページ数:
6
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773966 [1566773962]
言語:
英語
請求記号:
E23400/200314
資料種別:
国際会議録

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