Blank Cover Image

53. Effect of thermal annealing on mist-deposited HISiO4/SiO,/Si structures

著者名:
Chong, K.
Lee, D.-O.
Shanmugosondoroni, K.
Romon, P.
Shallenberger, J.
Wang, I.
Mumbaner, P.
Grant, R.
Rusyllo, J.
さらに 4 件
掲載資料名:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2003-14
発行年:
2003
開始ページ:
429
終了ページ:
436
総ページ数:
8
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773966 [1566773962]
言語:
英語
請求記号:
E23400/200314
資料種別:
国際会議録

類似資料:

Chang, K., Shanmugasundaram, K., Lee, D.-O., Roman, P., Shallenberger, J., Chang, F.-M., Wang, J., Beck, R., Mumbauer, …

Electrochemical Society

Hurley, P. K., Leveugle, C., Mathewson, A., Doyle, D., Whiston, S., Prendergast, J., Lundgren, P.

MRS - Materials Research Society

Lee, D., Roman, P., Mumbauer, P., Grant, R., Horn, M., Ruzyllo, J.

Electrochemical Society

K. Shanmugasundaram, S. Price, K. Chang, D. Lee, J. Ruzyllo

Electrochemical Society

Williams, J. A. A., Shen, C. Q., Vuong, K. D., Tenpas, E., Condrate, R. A., Sr., Lee, D. H., Wang, H., Fagan, J., Wang, …

MRS - Materials Research Society

Stedile, F.C., Radtke, C., Baumvol, I.J.R., Boudinov, H., McDonald, K., Huang, M.B., Weller, R.A., Feldman, L.C., …

Electrochemical Society

Zhao, W., Brotzen, F. R., Hehn. L., Loos, P. J.

MRS - Materials Research Society

W.Y. Wang, J.H. Huang, X.P. Zhang, W.J. Song, R.Q. Tan

Trans Tech Publications

J.H. Moon, K.Y. Cheong, D.I. Eom, H.K. Song, J.H. Yim, J.H. Lee, H.J. Na, W. Bahng, N.K. Kim, H.J. Kim

Trans Tech Publications

Wang, W., Banerjee, S., Chow, T.P., Gutmann, R.J., Issacs-Smith, T., Williams, J., Jones, K.A., Lelis, A., Tipton, W., …

Trans Tech Publications

Song, W. D., Shi, L. P., Miao, X. S., Hu, X., Lee, H. K., Zhao, R., Chong, J. F., Chong, T. C.

Materials Research Society

Wong, J., Lu, T-M., Cohen, S. S., Mehta, S.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12