28 Growth and characterization of Al2O3:HfO2 nanolaminate films deposited by Atomic Layer Deposition
- 著者名:
D'Emic, C.P. Gusev, E.P. Copel, M. Newbury, I. Unvel, H. Kozlowski, P. Bruley, J. Murphy, R. - 掲載資料名:
- Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2003-14
- 発行年:
- 2003
- 開始ページ:
- 217
- 終了ページ:
- 224
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773966 [1566773962]
- 言語:
- 英語
- 請求記号:
- E23400/200314
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
7
国際会議録
Physical Characterization of Ultrathin Films of High Dielectric Constant Materials on Silicon
Electrochemical Society |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society | |
Electrochemical Society | |
Electrochemical Society |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |