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12 Performance enhancements for 50-nm PMOS by angled pre-amorphization implants and fluorine implants

著者名:
Chidambaram, P.R.
Ekbote, S.
Chakravarthi, S.
Chatterjee, A.
Machala, C.F.
Johnson, S.F.
さらに 1 件
掲載資料名:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2003-14
発行年:
2003
開始ページ:
93
終了ページ:
98
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773966 [1566773962]
言語:
英語
請求記号:
E23400/200314
資料種別:
国際会議録

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