12 Performance enhancements for 50-nm PMOS by angled pre-amorphization implants and fluorine implants
- 著者名:
Chidambaram, P.R. Ekbote, S. Chakravarthi, S. Chatterjee, A. Machala, C.F. Johnson, S.F. - 掲載資料名:
- Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2003-14
- 発行年:
- 2003
- 開始ページ:
- 93
- 終了ページ:
- 98
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773966 [1566773962]
- 言語:
- 英語
- 請求記号:
- E23400/200314
- 資料種別:
- 国際会議録
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4
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(3.6) 5:20 - 5:40 PM - Epitaxially Strained SiGe Process to Improve Mobility in the PMOS Transistor
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