Characterization of Silicon Carbide Electrochemical Etch in Hydrofluoric Acid Aqueous Solution
- 著者名:
- 掲載資料名:
- State-of-the-art program on compound semiconductors XXXIX and nitride and wide bandgap semiconductors for sensors, photonics, and electronics IV : proceedings of the international symposia
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2003-11
- 発行年:
- 2003
- 開始ページ:
- 130
- 終了ページ:
- 135
- 総ページ数:
- 6
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773911 [1566773911]
- 言語:
- 英語
- 請求記号:
- E23400/200311
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
Electrochemical Society |
Kluwer Academic Publishers |
8
国際会議録
STRESS-CORROSION CRACKING AND BLISTERING OF THIN POLYCRYSTALLINE SILICON FILMS IN HYDROFLUORIC ACID
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
Trans Tech Publications |
Trans Tech Publications |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |