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Synthesis and Structural Characterizations of Vanadium Oxide Thin Films Prepared by MOCVD and ALD

著者名:
Mantoux, A.
Groult, H.
Doppelt, P.
Badot, J.C.
Balnois, E.
Baffler, N.
Lincot, D.
さらに 2 件
掲載資料名:
Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2003-8
発行年:
2003
開始ページ:
316
終了ページ:
324
総ページ数:
9
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773782 [1566773784]
言語:
英語
請求記号:
E23400/200308
資料種別:
国際会議録

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