
Fully Depleted SOI Process and Device Technology for Digital and RF Applications*
- 著者名:
Ichikawa, F. Nagatomo, V. Katakura, V. Itoh, S. Matsuhashi, H. Hirashita, N. Baba, S. - 掲載資料名:
- ULSI Process Integration : proceedings of the International Symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2003-6
- 発行年:
- 2003
- 開始ページ:
- 546
- 終了ページ:
- 555
- 総ページ数:
- 10
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773768 [1566773768]
- 言語:
- 英語
- 請求記号:
- E23400/200306
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
MRS - Materials Research Society |
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
Kluwer Academic Publishers |
4
![]() Materials Research Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |