60-nm Gate Length SOI CMOS Technology Optimized for 'System-on-a- SOI-Chip' Solution*
- 著者名:
Imai, K. Maruyama, S. Suzuki, T. Kudo, T. Miyake, S. Ikeda, M. Abe, T. Masuda, S. Tanabe, A. Lee, J.-W. Shibahara, K. Yokoyama, S. Ooka, H. - 掲載資料名:
- ULSI Process Integration : proceedings of the International Symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2003-6
- 発行年:
- 2003
- 開始ページ:
- 493
- 終了ページ:
- 502
- 総ページ数:
- 10
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773768 [1566773768]
- 言語:
- 英語
- 請求記号:
- E23400/200306
- 資料種別:
- 国際会議録
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