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Spectroscopic ellipsometry characterization of the interfacial roughness in SIMOX wafer

著者名:
Li, W.J.
Song, Z.R.
Tao, K.
Yu, Y.H.
Wang, X.
Zou, S.C.
さらに 1 件
掲載資料名:
Silicon-on-insulator technology and devices XI : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2003-5
発行年:
2003
開始ページ:
511
終了ページ:
516
総ページ数:
6
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773751 [156677375X]
言語:
英語
請求記号:
E23400/200305
資料種別:
国際会議録

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