Extremely scaled FinFETs and ultra-thin bod SOI CMOS Devices
- 著者名:
Balasubrarnanian, S. Chang, L. Choi, Y.-K. Ha, D. Lee, J. Ranade, P. Xiong, S. Bokor, J. Hu, C. King, T.-J. - 掲載資料名:
- Silicon-on-insulator technology and devices XI : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2003-5
- 発行年:
- 2003
- 開始ページ:
- 197
- 終了ページ:
- 208
- 総ページ数:
- 12
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773751 [156677375X]
- 言語:
- 英語
- 請求記号:
- E23400/200305
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
3
国際会議録
Extremely fine-pitch printing with a 10×Schwarzschild optic at extreme-ultraviolet wavelengths
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |