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Fully depleted SOI process and device technology for digital and RF application

著者名:
Ichikawa, F.
Nagatomo, Y.
Katakura, Y.
Itoh, S.
Matsuhashi, H.
Hirashita, N.
Baba, S.
さらに 2 件
掲載資料名:
Silicon-on-insulator technology and devices XI : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2003-5
発行年:
2003
開始ページ:
123
終了ページ:
132
総ページ数:
10
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773751 [156677375X]
言語:
英語
請求記号:
E23400/200305
資料種別:
国際会議録

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