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Status of 300 mm SOI material: comparisons with 200 mm

著者名:
Hovel, H.
Alnionte, M.
Tsai, P.
Lee, J.D.
Maurer, S.
Kleinhenz, R.
Schepis, D.
Murphy, R.
Ronsheim, P.
Domemcucci, A.
Rettinger, J.
Sadana, D.
さらに 7 件
掲載資料名:
Silicon-on-insulator technology and devices XI : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2003-5
発行年:
2003
開始ページ:
75
終了ページ:
80
総ページ数:
6
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773751 [156677375X]
言語:
英語
請求記号:
E23400/200305
資料種別:
国際会議録

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