Fabrication of sub-micron active layer SSOI substrates using ion splitting and wafer bonding technologies
- 著者名:
Ruddell, F.H. Rain, M.F. Suder, S. Hurley, R.E. Armstrong, R.M. Fusco, V.F. Gamble, H.S. - 掲載資料名:
- Silicon-on-insulator technology and devices XI : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2003-5
- 発行年:
- 2003
- 開始ページ:
- 57
- 終了ページ:
- 62
- 総ページ数:
- 6
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773751 [156677375X]
- 言語:
- 英語
- 請求記号:
- E23400/200305
- 資料種別:
- 国際会議録
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