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Replacing the BOX with buried alumina: improved thermal dissipation in SOI MOSFETs

著者名:
Oshima, K.
Cristoloveanu, S.
Guillaumot, B.
Carval, G.be
Lwai, H.
Mazure, C.
Kang, M.S.
Rae, Y.H.
Kwon, J.W.
Deleonibus, S.
Lee, J.H.
さらに 6 件
掲載資料名:
Silicon-on-insulator technology and devices XI : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2003-5
発行年:
2003
開始ページ:
45
終了ページ:
50
総ページ数:
6
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773751 [156677375X]
言語:
英語
請求記号:
E23400/200305
資料種別:
国際会議録

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