EPR Studies of SiCISiO2 Interfaces in n-type 4H-and 6H- Oxidized Porous SIC

EPR Studies of SiCISiO2 Interfaces in n-type 4H-and 6H- Oxidized Porous SIC

著者名:

von Bardeleben, H.J.

掲載資料名:

Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2003-2

発行年:

2003

開始ページ:

39

終了ページ:

54

総ページ数:

16

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773478 [1566773474]

言語:

英語

請求記号:

E23400/200302

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014065
シリーズID:	PA00000028
会議名:	Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
回次:	7th
会議開催地:	Paris, France
会議開催年:	2003.04.28-2003.05.02

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1 国際会議録 Microscopic Structure and Electrical Activity of 4H-SiC/SiO2 Interface Defects : an EPR Study of Oxidized Porous SiC von Bardeleben, H.J., Cantin, J.L., Shishkin, Y., Devaty, R.P., Choyke, W.J. Trans Tech Publications	7 国際会議録 Raman Spectra of a 4H-SiC Epitaxial Layer on Porous and Non-Porous 4H-SiC Substrates M.J. Clouter, Y. Ke, R.P. Devaty, W.J. Choyke, Y. Shishkin, S.E. Saddow Trans Tech Publications
2 国際会議録 EPR Studies of Interface Defects in n-Type 6H-SiC/SiO2 Using Porous SiC von Bardeleben, H.J., Cantin, J.L., Mynbaeva, M., Saddow, S.E. Trans Tech Publications	8 国際会議録 Porous Structure of Anodized p-Type 6H SiC Shishkin, Y., Ke, Y., Devaty, R.P., Choyke, W.J. Trans Tech Publications
3 国際会議録 Interface Defects in n-Type 3C-SiC/SiO2: An EPR Study of Oxidized Porous Silicon Carbide Single Crystals Bardeleben, H. J. von, Cantin, J. L., Ke, L., Shishkin, Y., Devaty, R. P., Choyke, W. J. Trans Tech Publications	9 国際会議録 EPR Study of Proton Implantation Induced Intrinsic Defects in 6H- and 4H-SiC von Bardeleben, H.J., Cantin, J.L. Trans Tech Publications
4 国際会議録 Modification of the Oxide/Semiconductor Interface by High Temperature NO Treatments: A Combined EPR, NRA and XPS Study on Oxidized Porous and Bulk n-Type 4H-SiC Bardeleben, H. J. von, Cantin, J. L., Vickridge, I., Song, Y., Dhar, S., Feldman, L. C., Williams, J. R., Ke, L., … Trans Tech Publications	10 国際会議録 SiC Pore Surfaces: Surface Studies of 4H-SiC(1-102) and 4H-SiC(-110-2) Starke, U., Lee, W.Y., Coletti, C., Saddow, S.E., Devaty, R.P., Choyke, W.J. Trans Tech Publications
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