Investigation of Slow/Fast Interface States of AI203 / Si MOS System Using Deep Level Transient Spectroscopy

Investigation of Slow/Fast Interface States of AI203 / Si MOS System Using Deep Level Transient Spectroscopy

著者名:

Jeon, I.S. ( (School of Materials Science and Engineering, Seoul National University) )

Eom, D. ( (School of Materials Science and Engineering, Seoul National University) )

Cho, M. ( (School of Materials Science and Engineering, Seoul National University) )

Park, H.B. ( (School of Materials Science and Engineering, Seoul National University) )

Park, J. ( (School of Materials Science and Engineering, Seoul National University) )

Hwang, C.S. ( (School of Materials Science and Engineering, Seoul National University) )

Kim, H.J. ( (School of Materials Science and Engineering, Seoul National University) )

さらに 2 件

掲載資料名:

Dielectrics in emerging technologies : proceedings of the international symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2003-1

発行年:

2003

開始ページ:

350

終了ページ:

357

総ページ数:

8

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773461 [1566773466]

言語:

英語

請求記号:

E23400/200301

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014064
シリーズID:	PA00000028
会議名:	International Symposium on Science and Technology of Dielectrics in Emerging Fields
回次:	1st
会議開催地:	Paris, France
会議開催年:	2003.04.27-2003.05.02

類似資料:

1 国際会議録 Quantitative Investigation of Near Interface Traps in 4H-SiC MOSFETs via Drain Current Deep Level Transient Spectroscopy M. Hauck, J. Weisse, J. Lehmeyer, G. Pobegen, H.B. Weber, M. Krieger Trans Tech Publications	7 国際会議録 Analysis of Interface States in Electrical Stressed Oxynitrided Gate Oxide Using Quasi-Static and Deep level Transient Spectroscopy Measurements Belkouch, S., Nguyen, T.K., Landsberger, L.M., Aktik, C., Jean, C., Kahrizi, M. Electrochemical Society
2 国際会議録 Investigation of ru Thin Films Prepared by Chemical Vapor Deposition as Bottom Electrodes for Memory Applications Kang, S.Y., Lim, H.J., Hwang, C.S., Kim, H.J. Electrochemical Society	8 国際会議録 Iron-Related Defect Centers in 4H-SiC Detected by Deep Level Transient Spectroscopy L. Trapaidze, R. Hollweck, S. Beljakowa, B. Zippelius, H.B. Weber Trans Tech Publications
3 国際会議録 On Deep Level Transient Spectroscopy of Extended Defects in n-Type 4H-SiC J. Weber, H.B. Weber, M. Krieger Trans Tech Publications	9 テクニカルペーパー Investigation of Atomization Characteristics and Prediction Accuracy of Hybrid Models for High-Speed Diesel Fuel Sprays. Park, S.W., Kim, H.J., Lee, C.S. Society of Automotive Engineers
4 国際会議録 Patterning with spacer for expanding the resolution limit of current lithography tool [6156-27] Jung. W.-Y., Kim, C.-D., Eom, J-.D., Cho, S.-Y., Jeon, S.-M., Kim, J.-H., Moon, J.-I., Lee, B.-S., Park, S.-K. SPIE - The International Society of Optical Engineering	10 国際会議録 Synthesis of ZnO Nanoparticles Embedded in a Polymeric Matrix; Effect of Curing Temperature Jeon, H.J., Chung, Y., Kim, S.Y., Yoon, C.S., Kim, Y.H. Trans Tech Publications
5 国際会議録 Why Debonding is Useful in SOI Cha, G., Lee, S.H., Park, H.J., Lee, K.H., Kang, H.S., Song, C.S., Kim, D.J., Kim, Y.C., Kim, S.K. Electrochemical Society	11 国際会議録 Improved light extraction efficiency in III-nitrite photonic crystal light-emitting diodes [5941-20] Kim, D.-H., Kim, J., Jeon, H., Park, Y. S., Cho, J, Im, J. S., Sone, C., Park, Y. SPIE - The International Society of Optical Engineering
6 国際会議録 Two-Dimensional Imaging of Trap Distribution in SiO₂/SiC Interface Using Local Deep Level Transient Spectroscopy Based on Super-Higher-Order Scanning … N. Chinone, R. Kosugi, Y. Tanaka, S. Harada, H. Okumura, Y. Cho Trans Tech Publications	12 国際会議録 Characterization of deep levels in oxygen-implanted silicon wafers by capacitance deep level transient spectroscopy Kang, H.S., Ahn, C.G., Lee, S.H., Kim, K.I., Kang, B.K., Bae, Y.H., Kwon, Y.K. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12