Low Temperature Polycrystalline Silicon Thin Film Transistors Fabricated by Electroless Plating Ni Induced Crystallization of Amorphous Si

Low Temperature Polycrystalline Silicon Thin Film Transistors Fabricated by Electroless Plating Ni Induced Crystallization of Amorphous Si

著者名:

掲載資料名:

Thin Film Transistor Technologies VI : proceedings of the international symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2002-23

発行年:

2002

開始ページ:

137

終了ページ:

139

総ページ数:

3

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773850 [1566773857]

言語:

英語

請求記号:

E23400/200223

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014056
シリーズID:	PA00000028
会議名:	Symposium on Thin Film Transistor Technologies - TFTT
回次:	6th
会議開催地:	Salt Lake City, Utah, USA
会議開催年:	2002.10.21-2002.10.23

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