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Chemical and Structural Characterization of Oxide Precipitates in Heavily Boron Doped Silicon by Infrared Spectroscopy and Transmission Electron Microscopy

著者名:
Gryse, O. De
Clauws, P.
Vanhellemont, J.
Lebedev, O.
Van Landuyt, J.
Simoen, E.
Claeys, C.
さらに 2 件
掲載資料名:
High purity silicon VII : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2002-20
発行年:
2002
開始ページ:
183
終了ページ:
196
総ページ数:
14
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773447 [156677344X]
言語:
英語
請求記号:
E23400/200220
資料種別:
国際会議録

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