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High Density Plasma Deposited Silicon Nitride Films for Coating InGaAlAs High-Power Lasers

著者名:
掲載資料名:
Plasma processing XIV : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2002-17
発行年:
2002
開始ページ:
35
終了ページ:
42
総ページ数:
8
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773416 [1566773415]
言語:
英語
請求記号:
E23400/200217
資料種別:
国際会議録

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