Laser Annealing for Ultra-Shallow Junction Formation in Advanced CMOS
- 著者名:
Surdeanu, R. Ponomarev, Y.V. Cerutti, R. Pawlak, B.J. Nanver, L.K. Hoflijk, I. Stolk, P.A. Dachs, C.J.J. Verheijen, M.A. Kaiser, M. Hopstaken, M.J.P. van Berkum, J.G.M. Roozeboom, F. Lindsay, R. - 掲載資料名:
- Rapid thermal and other short-time processing technologies III : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2002-11
- 発行年:
- 2002
- 開始ページ:
- 413
- 終了ページ:
- 428
- 総ページ数:
- 16
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773348 [1566773342]
- 言語:
- 英語
- 請求記号:
- E23400/200211
- 資料種別:
- 国際会議録
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