Blank Cover Image

Porous Silicon Sacrificial Layers Applied on Micromechanical Structures Fabrication

著者名:
掲載資料名:
Microelectronics technology and devices : SBMICRO 2002 : proceedings of the seventeenth international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2002-8
発行年:
2002
開始ページ:
125
終了ページ:
132
総ページ数:
8
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773287 [1566773288]
言語:
英語
請求記号:
E23400/2002-8
資料種別:
国際会議録

類似資料:

1 国際会議録 Porous Silicon Processing for Enhancing Thin Silicon Membranes Fabrication

Dantas, M.O.S., Galeazzo, E., Peres, H.E.M., Ramirez-Fernandez, F.J.

Electrochemical Society
7 国際会議録 Low temperature SiNx as a sacrificial layer in novel device fabrication

Lothian, J. R., Ren, F., Pearton, S. J., Abernathy, C. R., Tseng, B., Hobson, W. S.

MRS - Materials Research Society
2 国際会議録 Micromechanical structure development for chemical analysis:study of porous silicon as an adsorbent

Souza,S.G., Galeazzo,E., Silva,M.L.P., Furlan,R., Fernandez,F.J.R.

SPIE - The International Society for Optical Engineering
8 国際会議録 Porous silicon as a sacrificial material for microstructures fabrication

Morel, M., Berre, M. Le, Lysenko, V., Delhomme, G., Dittmar, A., Barbier, D.

MRS-Materials Research Society
3 国際会議録 Electrochemical Process for Silicon Tips Eabrication

Dantas, M.O.S., Galeazzo, E., Peres, H.E.M., Ramirez-Fernandez, F.J.

Electrochemical Society
9 国際会議録 Self-Assembled Polystyrene Micro-Spheres Applied for Photonic Crystal and Template Fabrication

Raimundo, D. S., Fernandez, F. J. R., Salcedo, W. J.

Electrochemical Society
4 国際会議録 Silicon Microtips Arrays Fabricated by HI-PS Technique for Application in Field Emission Devices

M. O. Dantas, M. M. Kopelvski, E. Galeazzo, H. E. Peres, J. R. Fernandez

Electrochemical Society
10 国際会議録 On Similar Electrical, Optical and Structural Properties of MOS Structures Prepared on a-Si:H/c-Si, Porous Silicon/c-Si, and c-Si

E. Pinčík, H. Kobayashi, R. Brunner, M. Takahashi, J. Rusnák

Trans Tech Publications
5 国際会議録 Optical properties modulation of porous silicon layers for optoelectronics applications

Salcedo,W.J., Peres,H.M., Galeazzo,E., Rubim,J.C., Ramirez-Fernandez,F.J.

SPIE-The International Society for Optical Engineering
11 国際会議録 Micromechanical structures and microelectronics for acceleration sensing

Davies,B.R., Montague,S., Smith,J.H., Lemkin,M.

SPIE-The International Society for Optical Engineering
6 国際会議録 Silicon Oxide Sacrificial Layer for MEMS Applications

Biasotto, C., Boscoli, F. A., Teixeira, R. C., Ramos, A. C. S., Diniz, J. A., Daltrini, A. M., Moshkalyov, S. A., Doi, …

Electrochemical Society
12 国際会議録 Integrated Fabrication of Micromechanical Structures on Silicon

Greenwood J. C.

Kluwer Academic Publishers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12