Enhancement of Photoluminescence And Microstructure of Undoped ZnO Thin Film Growth on Al2O3 (0001) Substrate by rf Magnetron Sputtering

Enhancement of Photoluminescence And Microstructure of Undoped ZnO Thin Film Growth on Al2O3 (0001) Substrate by rf Magnetron Sputtering

著者名:

掲載資料名:

State-of-the-art program on compound semiconductors XXXVI and wide bandgap semiconductors for photonic and electronic devices and sensors II : proceedings of the international symposia

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2002-3

発行年:

2002

開始ページ:

150

終了ページ:

154

総ページ数:

5

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773690 [1566773695]

言語:

英語

請求記号:

E23400/2002-3

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014037
シリーズID:	PA00000028
会議名:	State-of-the-art program on compound semiconductors ; Wide bandgap semiconductors for photonic and electronic devices and sensors
回次:	36th ; 2nd
会議開催地:	Philadelphia, PA, USA
会議開催年:	2002.05.12-2002.05.17

類似資料:

1 国際会議録 The Optical and Crystalline Structure Properties of ZnO Thin Films Grown by RF Magnetron Sputtering Kim, K. K., Park, S. J., Song, J. H., Song, J-H., Jung, H-J., Choi, W. K. MRS - Materials Research Society	7 国際会議録 Influence of Substrate Temperature on the Al and Zr Co-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering F. Huan, J.F. Leng, Z.C. Meng, B. Sun, W.S. He Trans Tech Publications
2 国際会議録 Effects of As Doping on Properties of ZnO Films Huh, K.S., Hwang, D.K., Bang, K.H., Hong, M.K., Lee, D.H., Myoung, J.M., Oh, M.S., Choi, W.K. Materials Research Society	8 国際会議録 Characteristics of SnO2 Thin Films Deposited by RF Magnetron Sputtering Ryu, H.W., Park, Y.J., Noh, H.S., Park, J.S. Trans Tech Publications
3 国際会議録 The Investigations of Dielectric Properties of BaTiO3 Thin Films on Polycrystalline Pt Substrates by RF Magnetron Sputtering Jang, Jin Wook, Cho, Woon Jo, Hahn, Taek Sang, Choi, Sang Sam, Chung, Su Jin MRS - Materials Research Society	9 国際会議録 Highly (h00) oriented growth of SrTiO₃ thin films on Si(100) substrates by RF magnetron sputtering and their optical properties J. H. Ma, J. H. Pin, Z. M. Huang, Y. H. Gao, T. Lin Society of Photo-optical Instrumentation Engineers
4 国際会議録 Influence Of Oxygen Addition And Substrate Temperature On Textured Growth Of Al Doped Zno Thin Films Prepared By RF Magnetron Sputtering Kuppusami, P., Diesner, K., Sieber, I., Ellmer, K. Materials Research Society	10 国際会議録 Effect of Substrate Temperature on the Properties of Al-Doped ZnO Films by RF Magnetron Sputtering Y.B. Wu, S. Lei, Z. Wang, R.H. Zhao, L. Huang Trans Tech Publications
5 国際会議録 The Effects of Various Substrate Temperature of Bi₂O₃ Buffer Layer on SBT (SrBi₂Ta₂O₉) Thin Films … J.E. Yoon, W.H. Cha, D.H. Hwang, C.S. Lee, I.S. Lee Trans Tech Publications	11 国際会議録 Epitaxial Growth of Mn-Doped ZnO Thin Films on Al2O3 (0001) Vaithianathan, V., Je, J.H., Lee, B.T., Kim, S.S. Trans Tech Publications
6 国際会議録 Blue Room-Temperature Photoluminescence of AlN Films, Prepared by RF Magnetron Sputtering Ligatchev, V., Yoon, S.F., Ahn, J., Zhang, Q., Rusli, Chew, K., Zhgoon, S. Materials Research Society	12 国際会議録 Pole Figure Analysis Of Epitaxial Films Of ZnO:2Wt%Al Grown On Sapphire Substrates By RF Magnetron Sputtering Kuppusami, P., Fiechter, S., Ellmer, K. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12