EFFECTIVE INTRINSIC GETTERING OF COPPER DURNG A SUB-QUARTER MICRON CMOS PROCESS
- 著者名:
Bae, K-M. Kim, J-R. Hong, Y-K. So, S-I. Lee, S-C. Kim, S-S. Ha, S-W. Koh, C-G. Pyi, S-H. Lee, D-M. - 掲載資料名:
- Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2002-2
- 発行年:
- 2002
- 開始ページ:
- 786
- 終了ページ:
- 792
- 総ページ数:
- 7
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773744 [1566773741]
- 言語:
- 英語
- 請求記号:
- E23400/2002-2
- 資料種別:
- 国際会議録
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