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THE CONTROL OF BORON AUTO-DOPING DURING DEVICE PROCESSING FOR P/P+ EPI WAFERS WITH NO BACK-SURFACE OXIDE SEAL

著者名:
Binns, M.I.
Kommu, S.
Seacrist, M.R.
Standley, R.W.
Wise, R.
Myers, D.J.
Tisserand, D.
Doyle, D.
さらに 3 件
掲載資料名:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2002-2
発行年:
2002
開始ページ:
682
終了ページ:
693
総ページ数:
12
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773744 [1566773741]
言語:
英語
請求記号:
E23400/2002-2
資料種別:
国際会議録

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