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MODELLING OF CRYSTAL ORIGINATED PARTICLES AND THEIR IMPACT ON GATE OXIDE INTEGRITY

著者名:
Bearda, T.
Mertens, P.W.
Woerlee, P.H.
Wallinga, H.
Sebmolke, R.
Heyns, M.
さらに 1 件
掲載資料名:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2002-2
発行年:
2002
開始ページ:
528
終了ページ:
539
総ページ数:
12
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773744 [1566773741]
言語:
英語
請求記号:
E23400/2002-2
資料種別:
国際会議録

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