Blank Cover Image

INTEGRATION ISSUES OF POLYSILICON WITH HIGH K DIELECTRICS DEPOSITED BY ATOMIC LAYER CHEMICAL VAPOR DEPOSITION

著者名:
Tsai, W.
Chen, I.
Carter, R.
Cartier, E.
Kluth, J.
Richard, O.
Claes, M.
Lin, Y.M.
Nohira, H.
Conard, T.
Caymax, M.
Young, E.
Vandervorst, W.
DeGendt, S.
Heyns, M.
Manabe, Y.
Maes, J.W.
Rittersma, Z.M.
Besling, W.
Roozeboom, F.
さらに 15 件
掲載資料名:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2002-2
発行年:
2002
開始ページ:
747
終了ページ:
760
総ページ数:
14
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773744 [1566773741]
言語:
英語
請求記号:
E23400/2002-2
資料種別:
国際会議録

類似資料:

Tsai, W., Chen, I., Carter, R., Cartier, E., Kluth, J., Richard, O., Claes, M., Lin, Y.M., Nohira, H., Conard, T., …

Electrochemical Society

Delabie, Annelies, Caymax, M., Maes, J.W., Bajolet, P., Brijs, B., Cartier, E., Conard, T., Gendt, S.De, Richard, O., …

Materials Research Society

Kaushik, V. S., DeGendt, S., Carter, R., Claes, M., Rohr, E., Pantisano, L., Kluth, J., Kerber, A., Cosnier, V., …

Materials Research Society

Zhao, C., Brijs, B., Dortu, F., DeGendt, S., Caymax, M., Heyns, M., Besling, W., Maes, J.W.

SPIE-The International Society for Optical Engineering

Kaushik, V.S., Gendt, S.De, Carter, R., Claes, M., Rohr, E., Pantisano, L., Kluth, J., Kerber, A., Cosnier, V., Cartier, …

Materials Research Society

Zhao, C., Bijjs, B., Dortu, F., DeGendt, S., Caymax, M, Heyns, M, Besling, W, Maes, J.W.

Electrochemical Society

Kaushik, V., De Gendt, S., Caymax, M., Young, E., Rohr, E., Van Elshocht, S., Delabie, A., Claes, M., Shi, X., Chen, I., …

Electrochemical Society

Caymax, Matty, Bender, H., Brijs, B., Conard, T., Gendt, S. De, Delabie, A., Heyns, M., Onsia, B., Ragnarsson, L., …

Materials Research Society

Elshocht, S. Van, Carter, R., Caymax, M., Claes, M., Conard, T., Date, L., Gendt, S. De, Kaushik, V., Kerber, A., Kluth, …

Materials Research Society

Carter, R.J., Tsai, W., Young, E., Caymax, M., Maes, J.W., Chen, P.J., Delabie, A., Zhao, C., Gendt, S.De, Heyns, M.

Materials Research Society

Elshocht, S.Van, Caymax, M., Gendt, S.De, Conard, T., Petry, J., Claes, M., Witters, T., Zhao, C., Brijs, B., Richard, …

Materials Research Society

Zhao, C., DeGendt, S., Caymax, M., Heyns, M., Consier, V., Maes, J.W., Roebben, G., Van Der Biest, O.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12