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INTEGRATION ISSUES OF POLYSILICON WITH HIGH K DIELECTRICS DEPOSITED BY ATOMIC LAYER CHEMICAL VAPOR DEPOSITION

著者名:
Tsai, W.
Chen, I.
Carter, R.
Cartier, E.
Kluth, J.
Richard, O.
Claes, M.
Lin, Y.M.
Nohira, H.
Conard, T.
Caymax, M.
Young, E.
Vandervorst, W.
DeGendt, S.
Heyns, M.
Manabe, Y.
Maes, J.W.
Rittersma, Z.M.
Besling, W.
Roozeboom, F.
さらに 15 件
掲載資料名:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2002-2
発行年:
2002
開始ページ:
747
終了ページ:
760
総ページ数:
14
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773744 [1566773741]
言語:
英語
請求記号:
E23400/2002-2
資料種別:
国際会議録

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