SILICON EPITAXY AND PARTICLE DYNAMICS: A THEORETICAL AND EXPERIMENTAL STUDY | 東京工業大学附属図書館文献データベース

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SILICON EPITAXY AND PARTICLE DYNAMICS: A THEORETICAL AND EXPERIMENTAL STUDY

著者名:: Kommu, S.
掲載資料名:: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology
シリーズ名:: Electrochemical Society Proceedings Series
シリーズ巻号:: 2002-2
発行年:: 2002
開始ページ:: 311
終了ページ:: 322
総ページ数:: 12
出版情報:: Pennington, NJ: Electrochemical Society
ISSN:: 01616374
ISBN:: 9781566773744 [1566773741]
言語:: 英語
請求記号:: E23400/2002-2
資料種別:: 国際会議録

詳細

TDL書誌ID:	ZA00014035
シリーズID:	PA00000028
会議名:	International Symposium on Silicon Materials Science and Technology
回次:	9th
会議開催地:	Philadelphia, PA, USA
会議開催年:	2002.05.13-2002.05.17

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